A raster-output 2D MEMS scanner with an 8 × 4 mm mirror for an automotive time-of-flight image sensor

We present a moving-magnet type raster-output 2D MEMS scanner with a large mirror. The mirror has resonance frequencies above 300 Hz to provide a high tolerance against automobile vibrations. To drive large mirrors, high driving torques are required. Electromagnets with tapered magnetic poles were used, which generated concentrated magnetic fields near a moving magnet. The fabricated MEMS scanner was 17×14×25 mm in size and achieved full mechanical rotation angles (FMRAs) of 10° in a non-resonance mode and 7° in a resonance mode.