Mirrorcletech MEMS mirror MEMS 振镜扫描镜

Mirrorcle Technologies， Inc. 成立于 2005 年，是一家私营公司，基于其专有的光学微机电系统（MEMS）技术提供商业产品和激光系统。

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Mirrorcle Technologies， Inc. 成立于 2005 年，是一家私营公司，基于其专有的光学微机电系统（MEMS）技术提供商业产品和激光系统。

Mirrorcle Technologies, Inc., founded in 2005, is a private corporation that commercially provides products and laser systems based on its proprietary optical microelectromechanical system (MEMS) technology. Since its founding, and supported by its continuous investment in R&D, the company has been offering the world’s fastest point-to-point (quasi-static) two-axis beam-steering MEMS Mirrors, as well as resonant-type micromirror devices with video rates. Mirrorcle is globally the only provider of tip-tilt MEMS actuators in combination with mirrors from submillimeter to several mm in diameter, offering customers a wide selection of specifications to optimize their paths to successful commercialization. Mirrorcle products can be found today in 3D metrology systems, biomedical imaging systems, solid-state LiDARs, AR/VR prototypes, laser projectors, and classrooms. Mirrorcle’s system solutions are complete easy-to-integrate products that provide visual messaging and 3D perception sensing for the robotics and drone market. These solutions with emphasis on lowest power consumption in the market include the world’s most compact vector graphics laser projector “Playzer”, and a compact and lightweight 3D LiDAR “SyMPL”. In addition to Mirrorcle’s popular R&D development kit packages and off-the-shelf products with established designs, the company’s R&D team sometimes engages in specialty design and fabrication projects.

Mirrorcle Technologies， Inc. 成立于 2005 年，是一家私营公司，基于其专有的光学微机电系统（MEMS）技术提供商业产品和激光系统。自成立以来，在持续研发投资的支持下，该公司一直在提供世界上最快的点对点（准静态）双轴光束转向MEMS镜子，以及具有视频速率的谐振型微镜设备。Mirrorcle 是全球唯一一家将直径从亚毫米到几毫米的反射镜与倾斜式 MEMS 致动器相结合的供应商，为客户提供广泛的规格选择，以优化他们成功商业化的途径。如今，Mirrorcle 产品可以在 3D 计量系统、生物医学成像系统、固态 LiDAR、AR/VR 原型、激光投影仪和教室中找到。Mirrorcle 的系统解决方案是完整、易于集成的产品，为机器人和无人机市场提供视觉信息和 3D 感知传感。这些强调市场上最低功耗的解决方案包括世界上最紧凑的矢量图形激光投影仪“Playzer”和紧凑轻巧的 3D LiDAR “SyMPL”。除了Mirrorcle的热门研发开发套件包和具有既定设计的现成产品外，该公司的研发团队有时也会参与专业的设计和制造项目。‍‍

Integrated MEMS Mirrors 集成型 MEMS 振镜

Integrated Mirrors of up to 2.4mm diameter are monolithically fabricated as an integrated part of the gimbal-less actuator device structure. They are the central area of the silicon die and share the same microfabrication steps as the surrounding electrostatic actuators. These mirrors are constructed of the same available silicon layers, featuring nearly perfectly flat and smooth silicon surfaces. On four sides, the mirrors are connected to bi-axial linkages that provide two-axis movement. Since 2016, we continually stock devices with integrated mirrors in the following diameters: 0.8mm, 1.2mm, 2.0mm and 2.4mm. All in-stock integrated mirrors are coated with pure Aluminum, which gives high reflectivity across a very wide range of wavelengths. Metallization with Gold can be done on wafer scale, and is therefore available for larger, production orders.

直径达 2.4 毫米的集成反射镜作为无万向节致动器设备结构的集成部分进行整体制造。它们是硅芯片的中心区域，与周围的静电致动器共享相同的微加工步骤。这些镜子由相同的可用硅层构成，具有几乎完美平坦和光滑的硅表面。在四个侧面，镜子连接到提供两轴运动的双轴连杆。自 2016 年以来，我们不断备有以下直径的带有集成反射镜的设备：0.8 毫米、1.2 毫米、2.0 毫米和 2.4 毫米。所有库存的集成反射镜均涂有纯铝，可在非常宽的波长范围内提供高反射率。金金属化可以在晶圆规模上完成，因此可用于更大的生产订单。

Mirror Sizes: 0.8 mm, 1.2mm, 1.6mm, 2.0mm, and 2.4mm diameter in stock.
Maximum tilt angle under point-to-point driving:-6° to +6° mechanical each axis, varies with design type.
Maximum tilt angle under resonant driving: -7° to +7° mechanical
Single-Axis Option: Most designs can be provided arranged for pure single-axis motion.

致动器型号	机械扫描角度 [°]	Die Size [mm]	振镜直径 [mm]	资料下载PDF
A3I8.2-800AL	±6	4.25 x 4.25	0.8	✓
A7M8.1-800AL	±4.75	5.20 x 5.20	0.8	✓
A7M10.2-1000AL	±4.75	5.20 x 5.20	1.0	✓
A3I12.2-1200AL	±5	4.25 x 4.25	1.2	✓
F1M16.2-1600AL	±4.5	5.20 x 5.20	1.6	✓
A7M20.2-2000AL	±5	5.20 x 5.20	2.0	✓
A5M24.3-2400AL	±5.5	7.25 x 7.25	2.4	✓

Bonded MEMS Mirrors

Bonded Mirrors are fabricated separately from the silicon actuator structure and are intended for subsequent microassembly on top of devices. Because these mirrors are attached from above the device actuator structure, they do not occupy a part of the actuator area and therefore can be essentially made in arbitrary sizes. The Bonded Mirrors methodology allows users to select the size, as well as the geometry of mirrors for each individual application, in order to optimize the trade-offs between speed, beam size, and scan angle. Mirrors are bonded onto ready-made actuators, providing the ability to economically adapt a small set of fabricated devices for a wide range of applications.

键合镜与硅致动器结构分开制造，用于器件顶部的后续微组装。由于这些反射镜是从设备致动器结构的上方连接的，因此它们不占用致动器面积的一部分，因此基本上可以制成任意尺寸。Bond Mirrors 方法允许用户为每个单独的应用选择反射镜的尺寸和几何形状，以便优化速度、光束尺寸和扫描角度之间的权衡。反射镜粘合到现成的致动器上，从而能够经济地使一小部分制造设备适应各种应用。

Bonded Mirror Sizes: 2.0, 2.4, 3.0, 3.6, 4.2, 4.6mm, and 5.0mm, 6.4mm, and 7.5mm diameter in stock.
Maximum tilt angle under point-to-point driving: -6° to +6° mechanical on each axis, varies with design type, and in some cases is limited by mirror size.
Maximum tilt angle under resonant driving: -7° to +7° mechanical, in some cases limited by mirror size.
Single-Axis Option: In-stock single-axis actuators can be combined with many of the available mirror sizes.

制动器型号	机械扫描角度 [°]	Die Size [mm]	Mirror Diameter [mm] 资料下载
	机械扫描角度 [°]		2.0	2.4	3.0	3.6	4.2	4.6	5.0	6.4	7.5
A7B1.3	±7	5.20 x 5.20	✓	✓	✓	✓	NR	NR	NR	NR	NR
A7B2.3	±6	5.20 x 5.20	NR	✓	✓	✓	NR	NR	NR	NR	NR
A8L2.2	±5	7.25 x 7.25	NR	NR	✓	✓	✓	✓	✓	NR	NR
A5L3.3(C2)	±4.25	7.25 x 7.25	✓	✓	✓	✓	✓	✓	✓	✓	NR
A5L3.3	±2.5	7.25 x 7.25	✓	✓	✓	✓	✓	✓	✓	✓	NR
A5L2.2	±1.15	7.25 x 7.25	✓	✓	✓	✓	✓	✓	✓	✓	✓

* ⍻ = Datasheet Not Available
* NR = Not Recommended驱动板：
提供模拟和数字驱动板
模拟驱动板：从输入接头连接器（如下指定）获取两个模拟输入，并转换为四个通道（偏置-差分方法），以将 MTI MEMS 反射镜器件驱动到全角度。驱动带宽宽。还包括保护电路，以减少设备损坏的可能性。安全操作还依赖于客户提供的时钟信号来设置板载低通滤波器的截止频率（该频率应根据每个器件数据表中的推荐值进行设置）。还必须在输入接头上提供直流电源电压。