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OCT用MEMS扫描镜

OCT用MEMS扫描镜

OCT用MEMS扫描镜

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OCT用MEMS扫描镜

OCT MEMS Mirror

OCT MEMS Mirror A8L2.2-5000AU-TINY48.4

Features and Specifications:

  • Gimbal-less Dual Axis MEMS Mirror

  • 5.0mm diameter, Gold Coated

  • Mech. Angle: ±5°

  • 1st Resonant Frequency: 300-350 Hz

  • Q-Factor: 18-30

  • Step Response: ~5ms (non-optimized drive)

  • Drive Voltage: 0-180V

  • Connectorized Package: TINY48.4 (20mm x 15mm)

Part Name: A8L2.2-5000AU-TINY48.4

Description:

The new A8L2 actuator is based on an established robust two-axis MEMS design which supports various bonded mirror sizes in large-angle beam steering. Previous versions of the design were named 13L1.x were manufactured at our UC Berkeley facility and were popular with many large-mirror customers. As a consequence of increases in orders, we transitioned the manufacture to our serial production line (manufacturing partner in Asia) and name it A8L2.

Other OCT MEMS Mirror choices:

Bonded Mirrors (Click on the ✓ symbol to view a sample datasheet, PDF)

Actuator NameMechanical
Angle [°]
Die Size
[mm]
Mirror Diameter [mm]

2.02.43.03.64.24.65.06.47.5
A7B1.1±75.20 x 5.20NRNRNRNRNR
A7B2.2±5.55.20 x 5.20NRNRNRNRNRNR
A8L1.1±67.25 x 7.25NRNRNRNRNR
A8L2.2±57.25 x 7.25NRNRNRNRNR
13Z2.1±2.57.26 x 7.26NRNR
A5L2.1±17.25 x 7.25

*NR = Not Recommended

Target Applications:
  • Solid State LiDAR
  • Free Space Optical Communications
  • Biomedical Imaging (OCT)
  • 3D Metrology and Tracking
  • Eye Tracking (AR/VR)

 






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