MEMS微扫描镜教学套件

提供Mirrorcletech全系列MEMS振镜产品

关于Mirrorcle 

Mirrorcle 科技公司 (MTI) 于2005 年2月在美国加州成立。Mirrorcle 在多年的研究项目基础上开发出了具有自己专利的光学微机电系统 (MEMS)产品，公司的目标是为客户提供商业化的产品和服务。 这些产品包括世界上最快速的大扫描角度二轴扫描微镜, 以及一系列共震型微镜装置，可在基于MEMS技术的VGA，SVGA 和高分辨率电视（HDTV）显示屏领域应用。Mirrorcle 是世界上唯一能根据客户需要订做直径从小于1mm到数mm 的孔径，带MEMS调制器的微镜供货商，为Mirrorcle 的客户采用最佳路径来达到成功应用提供广泛的技术参数选择。 除了为Mirrorcle 的客户的研发提供现货型产品外，Mirrorcle 也根据客户的特定需求设计和制造特殊产品。 

产品联系：sales@gamtic.com，185 0219 3480

MirrorcleMEMSMirrors产品特点：

MirrorcleMEMSMirrors微机械镜子(微镜)
•独家专利无转向节设计
•超低耗能、微型和廉价的波束控制方案
•极快的点对点双轴和单轴微镜
•超卓的可重复性和可靠性
•大倾斜机械角度,典型范围±6°
•点对点(准静态)或谐振动作
•镜子直径由0.8mm到7.5mm
•铝或黄金涂层
•细小、低耗能微机械驹动器

MirrorcleDevelopmentKits开发套装

•即插即用方案适用於原型制造、产品开发、科研、和教学。
•开发套装可从手提电脑、个人电脑、或流动设备控制微镜、激光、和配件等。
•标准开发套装包括：-3个微镜(1.2mm,2.0mm,3.6mm)
   -USB微镜控制器(可选择无线)
   -用途广泛的软件組合和软件开发套装
   -光学线路板/激光组件/安装支架
   -软件支援服務
•半定制开发套装包括：顾客自选3个微镜类型，尺寸，涂料，和包装。
•可配合附加件!廣角鏡,无线功能,激光追踪组合,PSD组合等等。

微扫描振镜教学套件 MEMS SCANNER Educator’s Kit

其他可选件：

MEMS Mirror Pack :

A3I12.2-1200AL-TINY20.4-A/W/TP

A7M20-2000AL-TINY20.4-A/W/TP 

A8L2.2-4600AL-TINY48.4-A/W/TP

教学应用案例

案例1： Core Engineering Concepts

案例2：Electrical Engineering: Filter Response

A MEMS mirror can be an excellent tool for exploring filter response and the effects of applying a filter input to a mechanical system.
MirrorcleDraw comes with a number of built-in software filters while the Controller has an onboard hardware filter (6th order Bessel)
This allows for experimentation with:

• Bessel

• Butterworth

• Chebyshev

• Elliptic

• Legendre

Demonstrate and study group delay by observing how a filter affects the mirror movement as opposed to the signal input.

案例3：Electrical Engineering: Lissajous

As Mirrorcle’s MEMS are dual-axis mirrors, they can be used to explore and experiment with Lissajous patterns!

Signal Analysis
Amplitude Modulation
Frequency Modulation

• Mixing frequencies

• Beat frequencies

案例4：Vector Graphics

案例5：Mechanical/Electrical: Resonance

MEMS MIRROR型号列表

• 集成微扫描镜Integrated Mirror Devices:

·         Mirror Sizes: 0.8 mm, 1.2mm, 1.6mm, 2.0mm, and 2.4mm diameter in stock.

·         Maximum tilt angle under point-to-point driving:-6° to +6° mechanical each axis, varies with design type.

·         Maximum tilt angle under resonant driving: -7° to +7° mechanical

·         Single-Axis Option: Most designs can be provided arranged for pure single-axis motion.

• 
  

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粘合微扫描镜Bonded Mirror Devices:

·         Bonded Mirror Sizes: 2.0, 2.4, 3.0, 3.6, 4.2, 4.6mm, and 5.0mm, 6.4mm, and 7.5mm diameter in stock.

·         Maximum tilt angle under point-to-point driving: -6° to +6° mechanical on each axis, varies with design type, and in some cases is limited by mirror size.

·         Maximum tilt angle under resonant driving: -7° to +7° mechanical, in some cases limited by mirror size.

·         Single-Axis Option: In-stock single-axis actuators can be combined with many of the available mirror sizes.

型号规格列表：

5.20mm Actuator：A7B1.1, A7B2.1

7.25mm Actuator：A8L2.2

7.25mm Actuator：A5L2.2, A5L3.3

SINGLE-AXIS MEMS MIRRORS (BI-DIRECTIONAL TILT ON X-AXIS):

Point-to-point or quasistatic single-axis MEMS mirrors with bi-directional tilt on the X-axis:

4.25mm Actuator：A1Q12.5

5.2mm Actuator：A9Q40

5.2mm Actuator：A9S1.1, A9S2.1

7.25mm Actuator：A8L2, A5L2, A5L3

Resonant single-axis MEMS mirrors with bi-directional tilt on the X-axis:

4.25mm Actuator：A1Rx

5.2mm Actuator：A9RX

7.25mm Actuator：A5L2.2S, A5L3.3S

A8L2.2-5000AU-TINY48.4-A/TP

A8L2.2-4600AU-TINY48.4-A/TP

A7M20.2-2000AL-TINY20.4-A/TP

A3I12.2-1200AL-TINY20.4-A/TP

A7M10.2-1000AL-TINY20.4-A/TP

 

驱动板资料：

Mirrorcle Development Kits include Software and USB MEMS Controllers with embedded MEMS Drivers:

• Development Kit Software and Hardware is the best solution for MEMS mirror driving, especially in initial prototype development.

• Plug-and-play package for rapid development, demonstration of concept, prototypes, and applications.

• Allows control of MEMS mirror, and laser from a laptop, PC, or mobile device via USB or bluetooth.

• Multiple IOs enable triggering of additional accessories and sampling with analog input channels.

• Provides access to customers' own development via several executable applications and multiple software development kits (C++, Matlab, and LabView SDKs).

• Multiple controllers can be controlled from a single PC, as well as connected together in a master and slave setup.

Hardware Solutions for driving MirrorcleTech MEMS:
(in production orders provided as PCBAs with no boxes or cables)

• USB MEMS Controller    "USB-SL MZ" (Pricing for single quantity is $1990)

• Mirrorcle-designed controller with a fast Microchip PIC32MZ MCU. Provides USB communication, driving for MEMS devices, synchronization with other systems, and programmable hardware filtering to avoid overshoot and ringing. Controller is USB bus-powered and provides power for the embedded MEMS driver and low-power peripherals. System can therefore run solely on a laptop powered by its battery. Interfacing with the Controller is provided by Windows applications and APIs (C++, Matlab, LabView), as shown in many SDK examples and executables included with the Mirrorcle Software Suite (sold separately). Limited MEMS driving functionality is also possible via serial terminal commands.

• 4x (16-bit) (0-200V) Analog Outputs for X and Y axis control of MEMS mirrors

• Programmable hardware-based low-pass filters and protection circuitry to reduce the chances of device damage

• Output bandwidth from 50Hz to 25kHz (governed by programmable low pass filters)

• 8x Correlated Digital Ouputs (3.3V logic) for controlling other components or systems

• Sample Rates up to 120,000 samples per second (120 kSPS)

• 500kB of Onboard RAM allows up to 100,000 samples to be stored

• 2x (12-bit) Analog Inputs with +/- 10V input range

• Flash Memory allows storage of settings and data for stand-alone operation (no PC)

• Sync Port for synchronization with additional Controllers or driving of laser peripherals

• USB Plug and Play support

• Separate Analog Input Port for a laser tracking photosensor (with laser tracking bundle purchase)

• Wireless Option (Add-On purchase) allows battery-run wireless operation over Bluetooth

• To request a complete User Guide, please contact MirrorcleTech sales.
  
  

• MEMS Driver - Digital Input       "PicoAmp 5.x" (Pricing for single qty is $590, note overall order MOV is $1600)

• Each unit uses a serial 16-bit DAC to convert a serial digital stream (interface from user's microcontroller or FPGA) to four channels (bias differential method) to drive MTI MEMS mirror devices to full angles. Wide bandwidth actuation. Also included is protection circuitry to reduce the chances of device damage. Safe operation further relies on the customer-provided clock signal for setting the cut-off frequency of on-board low-pass filters (that frequency should be set based on recommended value in each device datasheet). A dc supply voltage must also be provided on the input header.

• INPUT: 10-pin header connector (0.05", 2 rows, vertical) with SPI digital interface and other connections
  

• OUTPUT: 10-pin header connector (0.05", 2 rows, right angle) with four (4) channels of MEMS driving voltages between ~0V - 200V for capacitive MEMS loads (low current)

• Includes a fast, 16-bit 4-channel DAC to convert a serial digital stream (interface from user's microcontroller or FPGA) to four (4) built-in hardware Low-Pass-Filters

• A clock waveform on the corresponding input pin is required to set the LPF cut-off

• Powered by +5VDC (4.9V-5.1V) provided by user on input header connector with power consumption of ~75-85mW

• To request a complete User Guide, please contact MirrorcleTech sales.
  
  

• MEMS Driver - Analog Input       "BDQ PicoAmp 5.x" (Pricing for single qty is $590, note overall order MOV is $1600)
  

• Takes two analog inputs from input header connector (specified below) and converts to four channels (bias-differential method) to drive MTI MEMS mirror devices to full angles. Wide bandwidth of actuation. Also included is protection circuitry to reduce the possibility of device damage. Safe operation further relies on the customer-provided clock signal for setting the cut-off frequency of on-board low-pass filters (that frequency should be set based on recommended value in each device datasheet). A dc supply voltage must also be provided on the input header.

• INPUT: 10-pin header connector (0.05", 2 rows, vertical) with analog input for X- and Y-axis (voltage range -10V to +10V, with 0V for origin), and other connections
  

• OUTPUT: 10-pin header connector (0.05", 2 rows, right angle) with four (4) channels of MEMS driving voltages for capacitive loads (low output currents)

• B160 Option: Vbias = 80V, Range 0V - 160V

• T180 Option: Vbias = 90V, Rnage 0V - 180V

• X200 Option: Vbias = 100V, Range 0V - 200V

• Includes four (4) built-in hardware Low-Pass-Filters

• A clock waveform on the corresponding input pin is required to set the LPF cut-off

• Powered by +5VDC (4.9V-5.1V) provided by user on input header connector with power consumption of ~75mW

• To request a complete User Guide, please contact MirrorcleTech sales.
  
  

• Breakout PCBA for Input connector of MEMS Drivers, P/N: BRK-DRIVER-5.x (Note it is only offered with a purchase of a Mirrorcle MEMS Driver and overall order MOV is $1600)
  

• PCBA which breaks out the input connection side of both digital and analog-input MEMS driver to easy to use terminals or test points / pins. Each pin of the 10-pin connector has its own screw terminal connection and easy to read label. Recommended and prepared for first-time users of Mirrorcle's MEMS Drivers. Typically a new user should purchase one of these PCBAs with the first purchase of a MEMS Driver 5.x.

• INPUT: Screw terminals, test points, connect pins - multiple options for easy connections to the driver inputs.
  

• OUTPUT: 10-pin header connector (0.05", 2 rows, right angle) which can be directly connected to MEMS Drivers (Analog and Digital) of 5.x generations.

Detailed Descriptions and Helpful Downloads

• Mirrorcle Technologies Hardware Guide (PDF)

产品联系：sales@gamtic.com，185 0219 3480